The amorphous TbCo films with perpendicular anisotropy have been prepared and the influences of processing parameters on the magnetic anisotropy energy are investigated. The results showed that the magnetic anisotropy of the TbCo films could be greatly influenced by the factors, such as composition, sputtering pressure, substrate biased voltage and post-annealing temperature. When the concentration of Tb is around 30%, or the sputtering pressure is 0.53 Pa, the maximum Ku value can be obtained. When the substrate biased voltage exceeded-60 V, the Ku value increases obviously. But if the biased...