期刊论文

Gray-scale mask technique used for fabricating microstructure device

中文

微细加工技术

1003-8213

2001

2

71-75

2000年中国博士后科学基金资助项目； 湖北省自然科学基金资助项目! （2 0 0 0JI50 ）；

本校为第一机构

讨论了灰度掩模技术在凸及凹形微透镜、折衍射复合微透镜和微尖形阵列等器件制作方面的应用,给出了与几种典型的凸及凹形微透镜、折衍射复合微透镜和微尖形结构对应的灰度掩模板的设计实例及其应用,为灰度掩模技术制作微透镜器件及微尖形阵列奠定了基础.

The applications of gray-scale mask technique in the fabrication of convex and concave microlens,hybrid refraction diffration microlens and microtip array are discussed. The several design and application examples of gray-scale mask used for fabricating several typical devices, such as convex and concave microlens, hybrid refraction-diffraction microlens and microtipstructure, are given. The research results about gray-scale mask technique can be apply t...