期刊论文

Microtip structure device used for improving the performance of anti-laser-ablation

中文

微细加工技术

1003-8213

2001

2

67-70

2000年中国博士后科学基金资助项目； 湖北省自然科学基金资助项目!（2 0 0 0JI50 ）；

本校为第一机构

讨论了光刻热熔成形工艺灰度掩模技术结合离子束蚀刻制作面阵尖形微结构器件的问题,分析了几种凸尖及凹尖结构抗入射激光烧蚀的能力强于平面端面同质器件的原因,所作的若干分析结果可用于这类器件的实际制作和应用.

The fabrication of large-area microtip structure device using thermal treatment technology,gray-scale mask technique and ion beam etching, is discussed. The several devices with convex and concave tip structures,have better antilaser-ablation perfomance than the devices with planar face, and the reasons are analyzed.The several analysis results can be used for fabrication a...