期刊论文

Deng, Y.R.

中文

材料研究学报

1005-3093

2001

15

2

205-208

10.3321/j.issn:1005-3093.2001.02.009

国家自然科学基金资助项目59602004；

本校为第一且通讯机构

在离子束辅助激光制备取向薄膜的物理机制基础上．利用计算机模拟了织构薄膜生长的物理过程．结果表明，织构薄膜的质量直接与不同取向晶粒被辅助粒子束溅射掉的几率相关，这在实验中表现为与辅助离子束入射方向、离子束能量、薄膜材料种类等因素有关．

Based on the mechanism of depositing oriented film with assistant ion beam by laser ablation, the growth development of the textured films were simulated. The oriented films deposited with assistant ion beam are the result of the higher sputtering yields of all orientation other than the retained crystallites direction. Utilizing the simulated experiment, the relationship between the aligned film status and the film thickness (film depositing time) was discussed when aligned and non-aligned crystallites deposit on the substrate in different probabilities. The results showed that the quality of...