C60 films were deposited on Si(111) substrates at the room temperature and 77K temperature. The microstructures of the films prepared on two different substrates were studied with the scanning electron microscope; and the optical parameters (including absorption spectrum,refractive index,and dielectric constant) of C60 films were measured with ellipsometer.The results show that with the decrease of the temperature of substrates the uniformity of the film becomes better, and the particles of the film turn smaller, at the optical absorption peaks of C60 film prepared on the 77K substrate present...