We report the growth and structural properties of hollow-opened ZnO/Zn and solid Zn/ZnO single crystal microspheres on a silicon (111) substrate. The microspheres were synthesized from ZnO mixed with Zn by chemical vapour deposition. The ZnO/Zn microspheres exhibit a hollow interior and a spherical shell with a partly opened mouth along the c-axis of the hexagonal wurtzite ZnO structure oriented vertically to the substrate. The Zn/ZnO microspheres are solid. The microsphere growth process includes the deposition of Zn and ZnO particles followed by the evaporation of Zn from the breaking shell ...