National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [61274140, 61306003]
机构署名：
本校为第一机构
院系归属：
物理科学与技术学院
摘要：
Luminescent a-SiCxOy films were prepared at a low temperature of 150 °C by using very high frequency plasma enhanced chemical vapor deposition technique. The prepared a-SiCxOy films present remarkable photoluminescence with yellow to blue shifting emission when increasing the oxygen content from 29% to 44%. Interestingly, the light emissions in the visible region can be clearly observed with the naked eyes in a bright room. The structure and the chemical compositions of the films were further investigated by Raman spectroscopy and Fourier tran...
