期刊论文

中文

汉江师范学院学报

2096-3734

2008

28

3

23-25

10.3969/j.issn.1008-6072.2008.03.009

湖北省教育厅资助项目（项目编号:D20086002）；

本校为其他机构

利用磁控溅射法在玻璃基片制备TbCo非晶垂直磁化膜，采用样品振动磁强计和磁转矩测量仪测量薄膜的磁性能和磁转矩曲线．结果表明：Cr底层、TbCo磁性层组分、溅射气压、基片偏压、退火温度和TbCo磁性层厚度对薄膜的磁各向异性能都有很大影响．．

TbCo amorphous perpendicular magnetized film is prepared on glass substrat by way of magnetron sputtering and sample vibration magnetometer and magnetic torque instrument are used to determine film＇s magnetic property and torque curve. The result shows that Cr base, TbCo magnetic structure, sputtering pressure, substrat bias, annealing temperature and Tbco thickness all have great influenc...