As an expmple, the nuclear micro-probe facility in the Forschungszentrum Rossendorf is introduced, which has a minimum beam size of 2 micrometers and can be used to perform particle induced X-ray emission (PIXE), nuclear reaction analysis (NRA), elastic recoil detection analysis (ERDA), Rutherford back scattering (RBS) and channeling etc. micro-beam analyses. By using single point, linear and lateral scanning, the elements composition and distribution in samples can be studied in micrometer scale. In this work, 16 MeV, 3 μm Si~(5+) beam is use...