SmCo/Cu magnetic thin films were prepared on glass substrates by RF magnetron sputtering system. The sputtering parameters of the magnetic thin films were optimized by the parameter control method and the SmCo thin films with coercivity up to 2400 Oe that in the plane direction were obtained. By controlling the temperature of Cu underlayer,the magnetization orientation of the films changed from in-plane to perpendicular and the coercivity up to 6215 Oe for SmCo/Cu thin films were fabricated. The STM images revealed that SmCo/Cu thin ...