SmCo magnetic thin films were prepared on water-cooled glass substrates by multigun RF magnetron sputtering system.The effect of sputtering power,sputtering time and sputtering pressure on the magnetic properties of the thin films was investigated.It is found that when the sputtering power,sputtering pressure and sputtering time of the SmCo thin films and the underlayer are 60w,0.5Pa and 8min,125w,0.5Pa and 4min,respectively,the coercivity that in the plane direction is as high as 3500Oe.The VSM measurements revealed that SmCo thi...